Pressure effects on HiPIMS deposition of hafnium films-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Pressure effects on HiPIMS deposition of hafnium films

Published:2012-05 Issue:18 Volume:206 Page:3795-3802
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Reed A.N.,Lange M.A.,Muratore C.,Bultman J.E.,Jones J.G.,Voevodin A.A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference51 articles.

1. SVC, Society of Vacuum Coaters — 48th Annual Technical Conference, April 23, 2005–April 28, 2005;Helmersson,2005

2. High power pulsed magnetron sputtering: A review on scientific and engineering state of the art

3. Ionized physical vapor deposition (IPVD): A review of technology and applications

4. A novel pulsed magnetron sputter technique utilizing very high target power densities

5. High power pulsed magnetron sputtered CrN films

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A novel strategy towards the fabrication of highly stable and sensitive non-enzymatic glucose sensor based on Ni3N thin films using high power impulse magnetron sputtering;Applied Surface Science;2024-10

2. Advances in Preparation Technology of Tool Coatings;Academic Journal of Science and Technology;2023-02-08

3. Modulation of carrier density in indium–gallium–zinc-oxide thin film prepared by high-power impulse magnetron sputtering;Vacuum;2023-01

4. A review on the preparation of thin-film YSZ electrolyte of SOFCs by magnetron sputtering technology;Separation and Purification Technology;2022-10

5. High-quality transparent conductive indium oxide film deposition by reactive pulsed magnetron sputtering: Determining the limits of substrate heating;Applied Surface Science;2022-05

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3