The influence of Ti doping on the mechanical properties of TaN film
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
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3. Structure and properties of Ta doped TiN films prepared using different sputtering powers for Ta target;Processing and Application of Ceramics;2022
4. Deposition of solid solution films using reactive magnetron sputtering of a sandwich target;Journal of Physics: Conference Series;2021-06-01
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