Characterization of a MEMS tribogauge-Reference-Cited by-同舟云学术

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Characterization of a MEMS tribogauge

Published:2013-01 Issue: Volume:215 Page:306-311
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Vijayasai Ashwin,Sivakumar Ganapathy,Ramachandran Gautham,Anderson Charlie,Gale Richard,Dallas Tim

Funder

National Science Foundation MRI grant

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference23 articles.

1. Tech. Rep. LDRD #52553, SAND2004-6635;Baker,2004

2. 2nd International Conference on Engineering Design and Automation, Maui, Hawaii;Sniegowski,1998

3. Surface-micromachined gear trains driven by an on-chip electrostatic microengine

4. Tribology of MEMS

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Particle Tracking of a Complex Microsystem in Three Dimensions and Six Degrees of Freedom;2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS);2020-01

2. Particle Tracking of Microelectromechanical System Performance and Reliability;Journal of Microelectromechanical Systems;2018-12

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