Thermal stability of magnetron sputtered Zr–Si–N films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference35 articles.
1. Titanium aluminum nitride films: A new alternative to TiN coatings
2. Oxidation of TiN, ZrN, TiZrN, CrN, TiCrN and TiN/CrN multilayer hard coatings reactively sputtered at low temperature
3. Thermal stability and oxidation resistance of TiAlN/CrN multilayer coatings
4. Comparison of TiN, ZrN and CrN hard nitride coatings: Electrochemical and thermal oxidation
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2. Effect of nitrogen on the structure and properties of Zr-Si-B-N coatings deposited by magnetron sputtering;Surface and Coatings Technology;2023-12
3. Investigation of the Physical and Mechanical Properties of Coatings Obtained by the Vacuum-Arc Sputtering of Ti–B–Si–Ni Cathodes Manufactured Using Self-Propagating High-Temperature Synthesis and Pressing;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-06
4. Study of the Physical and Mechanical Properties of Coatings Obtained by Vacuum-Arc Spraying of Ti–B–Si–Ni Cathodes Manufactured Using Self-Propagent High-Temperature Synthesis and Pressing;Поверхность. Рентгеновские, синхротронные и нейтронные исследования;2023-06-01
5. The effect of the Ar/N2 gas ratio on the structure and properties of Ta-Si-N coatings produced by magnetron sputtering of TaSi2 target;Surfaces and Interfaces;2023-04
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