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Etching of carbon–tungsten composite with oxygen plasma

  • Published:2010-01 Issue:9-10 Volume:204 Page:1503-1508
  • ISSN:0257-8972
  • Container-title:Surface and Coatings Technology
  • language:en
  • Short-container-title:Surface and Coatings Technology

Author:

Vesel A.,Mozetič M.,Panjan P.,Hauptman N.,Klanjsek-Gunde M.,Balat-Pichelin M.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Cited by 31 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Preparation of W-Ni-Cu Alloy Powder by Hydrogen Reduction of Metal Oxides;Korean Journal of Metals and Materials;2024-05-05

2. Study of Tungsten-Doped Carbon Hard Mask Etch Process Using NF3/O2 Based Chemistry;2024 Conference of Science and Technology for Integrated Circuits (CSTIC);2024-03-17

3. Surface morphology engineering of metal oxide-transition metal dichalcogenide heterojunction;Journal of Asian Ceramic Societies;2022-09-05

4. Consolidation and properties of tungsten by spark plasma sintering and hot isostatic pressing;International Journal of Refractory Metals and Hard Materials;2021-09

5. Fabrication of W-Y2O3 composites by ultrasonic spray pyrolysis and spark plasma sintering;International Journal of Refractory Metals and Hard Materials;2021-09
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