Effect of microstructure on the mechanical properties of carbon nanofilms deposited on the Si(100) at high temperature under ultra high vacuum-Reference-Cited by-同舟云学术

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Effect of microstructure on the mechanical properties of carbon nanofilms deposited on the Si(100) at high temperature under ultra high vacuum

Published:2009-12 Issue:6-7 Volume:204 Page:1066-1070
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Chung C.K.,Hung S.T.,Lai C.W.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference20 articles.

1. Microstructure and mechanical properties of hard carbon films prepared by heat treatment of a polymer on steel substrate

2. Nanoindentation and nanoscratching studies of amorphous carbon films

3. Growth and microhardness of SiC films by plasma-enhanced chemical vapor deposition

4. H2 carrier gas dependence of Young's modulus and hardness of chemical vapor deposited polycrystalline 3C-SiC thin films

5. Preparation of amorphous Si1−xCx (0≤x≤1) films by alternate deposition of Si and C thin layers using a dual magnetron sputtering source

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Less-Common Carbon Nanostructures;Carbon Allotropes: Metal-Complex Chemistry, Properties and Applications;2019

2. “Home”-Like Nanostructures;Handbook of Less-Common Nanostructures;2012-03-19

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