Preparation of titanium oxynitride thin films by reactive sputtering using air/Ar mixtures
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference25 articles.
1. Optical properties of titanium oxynitride nanocrystals synthesized via a thermal liquid–solid metathesis reaction
2. Structural, optical and mechanical properties of coloured TiNxOy thin films
3. Titanium oxynitride thin films sputter deposited by the reactive gas pulsing process
4. Preparation and characterization of titanium oxynitrides with high specific surface areas
5. Structural and Electrical Properties of TiN[sub x]O[sub y] Thin-Film Resistors for 30 dB Applications of π-type Attenuator
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1. In situ grazing incidence synchrotron x-ray diffraction studies on the wakeup effect in ferroelectric Hf0.5Zr0.5O2 thin films;Applied Physics Letters;2024-07-15
2. Air-based sputtering deposition of TiN(O)/a-TiNxOy multilayer films for enhanced mechanical properties and corrosion resistance;Surface and Coatings Technology;2024-04
3. Enhancement of photoelectrochemical performance for nitrogen-doped titanium dioxide-based thin films produced by a facile air-based sputtering deposition;Ceramics International;2024-03
4. Photocatalytical and corrosion behavior of sputtered zirconium oxynitride thin films doped with titanium;Surfaces and Interfaces;2023-11
5. Air-based sputtering deposition of titanium oxynitride-based single, gradient, and multi-layer thin films for photoelectrochemical applications;Ceramics International;2023-05
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