Properties of SixNy thin film deposited by plasma enhanced chemical vapor deposition at low temperature using SiH4/NH3/Ar as diffusion barrier film-Reference-Cited by-同舟云学术

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Properties of SixNy thin film deposited by plasma enhanced chemical vapor deposition at low temperature using SiH4/NH3/Ar as diffusion barrier film

Published:2008-08 Issue:22-23 Volume:202 Page:5617-5620
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Pham Thuy T.T.,Lee J.H.,Kim Y.S.,Yeom G.Y.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference13 articles.

1. SiOxNy thin film deposited by plasma enhanced chemical vapor deposition at low temperature using HMDS–O2–NH3–Ar gas mixtures

2. Local atomic structure in thin films of silicon nitride and silicon diimide produced by remote plasma-enhanced chemical-vapor deposition

3. High rate deposition of silicon nitride films by APCVD

4. Effects of plasma pretreatment on silicon nitride barrier films on polycarbonate substrates

5. Water and oxygen permeation of silicon nitride films prepared by plasma-enhanced chemical vapor deposition

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1. Towards highly specific measurement of binary mixtures by tandem operation of nanomechanical sensing system and micro-Raman spectroscopy;Sensors and Actuators B: Chemical;2022-09

2. Impact on the Gas Barrier Property of Silicon Oxide Films Prepared by Tetramethylsilane-Based PECVD Incorporating with Ammonia;Applied Sciences;2017-01-05

3. Long-term stable water vapor permeation barrier properties of SiN/SiCN/SiN nanolaminated multilayers grown by plasma-enhanced chemical vapor deposition at extremely low pressures;Applied Physics Letters;2014-08-04

4. Organosilicon/silicon oxide gas barrier structure encapsulated flexible plastic substrate by using plasma-enhanced chemical vapor deposition;Surface and Coatings Technology;2012-06

5. Composite layer formation on plastic substrates for flexible display by using functionalized nanoclay;Macromolecular Research;2012-04-20

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