Author:
Chappé J.M.,Carvalho P.,Lanceros-Mendez S.,Vasilevskiy M.I.,Vaz F.,Machado A.V.,Fenker M.,Kappl H.,Parreira N.M.G.,Cavaleiro A.,Alves E.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference21 articles.
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5. Investigation of Niobium oxynitride thin films deposited by reactive magnetron sputtering
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