CrB2 coatings deposited by inductively coupled plasma assisted DC magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
1. Co-sputtered TiB2 as a diffusion barrier for advanced microelectronics with Cu metallization
2. CrB[sub 2] Schottky Barrier Contacts on n-GaN
3. Fundamental properties and wear resistance of r.f.-sputtered TiB2 and Ti(B,N) coatings
4. New Cr-B hard coatings by r.f.-plasma assisted magnetron sputtering method
5. Magnetron sputter deposition of chromium diboride coatings
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