Crystalline vanadium nitride ultra-thin films obtained at room temperature by pulsed laser deposition
Author:
Funder
PN09390101
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
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1. Effects of experimental parameters on the physical properties of non-stoichiometric sputtered vanadium nitrides films
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4. Study of ultrathin vanadium nitride as diffusion barrier for copper interconnect
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