Influence of substrate bias voltage on structure, mechanical and corrosion properties of ZrO2 thin films deposited by Reactive Magnetron Sputter Deposition-Reference-Cited by-同舟云学术

Influence of substrate bias voltage on structure, mechanical and corrosion properties of ZrO2 thin films deposited by Reactive Magnetron Sputter Deposition

Published:2020-07 Issue: Volume:393 Page:125821
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Zegtouf Hind,Saoula Nadia,Azibi Mourad,Bait Larbi,Madaoui Noureddine,Khelladi Mohamed Redha,Kechouane Mohamed

Funder

National Funding of Research

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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