Residual stresses and tribomechanical behaviour of TiAlN and TiAlCN monolayer and multilayer coatings by DCMS and HiPIMS

Author:

Tillmann Wolfgang,Grisales DiegoORCID,Stangier DominicORCID,Thomann Carl-Arne,Debus Jörg,Nienhaus Alexander,Apel Daniel

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference58 articles.

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2. High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications;Lundin,2020

3. PVD: cathodic arc and high power impulse magnetron sputtering (HIPIMS);Anders,2013

4. A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS);Anders;Surf. Coat. Technol.,2014

5. F. Uny, E. Blanquet, F. Schuster, F. Sanchette, Ti-Al-N-based hard coatings: thermodynamical background, CVD deposition, and properties. A review. Coatings and Thin-Film Technologies, in: IntechOpen.

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