Investigation of the structure and phase composition of the microdroplets formed during the deposition of PVD coatings-Reference-Cited by-同舟云学术

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Investigation of the structure and phase composition of the microdroplets formed during the deposition of PVD coatings

Published:2022-07 Issue: Volume:441 Page:128574
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Vereschaka Alexey,Milovich Filipp,Andreev Nikolay,Sotova Catherine,Alexandrov Islam,Muranov Alexander,Mikhailov Maxim,Tatarkanov Aslan

Funder

Ministry of Education and Science of the Russian Federation

Ministry of Science and Higher Education of the Russian Federation

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference71 articles.

1. Macroparticle contamination in cathodic arc coatings: generation, transport and control;Boxman;Surf. Coat. Technol.,1992

2. Reduction of droplet emission in random arc technology;Steffens;Surf. Coat. Technol.,1991

3. Reduction in macroparticles during the deposition of TiN films prepared by arc ion plating;Akari;Surf. Coat. Technol.,1990

4. Ion beam self-sputtering using a cathodic arc ion source;Sanders;J. Vac. Sci. Technol. A,1988

5. Structure and properties of coatings composed of TiN–Ti obtained by the reactive pulse plasma method;Michalski;J. Mater. Sci. Lett.,1984

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4. Investigation of the wear pattern of the Ti-TiN-(Ti,Al,Cr)N nanostructured coating with a varying modulation period;International Journal of Refractory Metals and Hard Materials;2023-09

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