Reducing the macroparticle content of cathodic arc evaporated TiN coatings-Reference-Cited by-同舟云学术

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Reducing the macroparticle content of cathodic arc evaporated TiN coatings

Published:2004-05 Issue:2-3 Volume:183 Page:283-294
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Harris S.G.,Doyle E.D.,Wong Y.-C.,Munroe P.R.,Cairney J.M.,Long J.M.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference32 articles.

1. Components of cathode erosion in vacuum arcs

2. Problems in the physical vapour deposition of titanium nitride

3. Characteristics of Macroparticle Emission from a High-Current-Density Multi-Cathode Spot Vacuum Arc

4. Review of the filtered vacuum arc process and materials deposition

5. Review of cathodic arc deposition technology at the start of the new millennium

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