Effect of ion beam etching on the surface roughness of bare and silicon covered beryllium films-Reference-Cited by-同舟云学术

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Effect of ion beam etching on the surface roughness of bare and silicon covered beryllium films

Published:2017-02 Issue: Volume:311 Page:351-356
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Chkhalo N.I.,Mikhailenko M.S.,Mil'kov A.V.,Pestov A.E.,Polkovnikov V.N.,Salashchenko N.N.,Strulya I.L.,Zorina M.V.,Zuev S.Yu.

Funder

RFBR

IPM

RSF-DFG

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference28 articles.

1. High-temperature multilayers;Yulin,2005

2. Enhanced reflectivity and stability of high-temperature LPP collector mirrors;Feigl,2008

3. Status of X-ray mirror optics at the Siberian SR Centre;Chkhalo;Nucl. Instrum. Methods Phys. Res. A,1995

4. Development of an EUVL collector with infrared radiation suppression;Kriese,2014

5. Space solar research: achievements and prospects;Kuznetsov;Physics-Uspekhi,2015

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2. Ion beam figuring for X-ray mirrors: history, state-of-the-art and future prospects;Journal of Synchrotron Radiation;2024-05-21

3. Study of the Influence of the Energy of Argon Ions on the Surface Roughness of the Main Sections of Single-Crystal Silicon;Technical Physics;2024-01

4. Study of the Influence of the Energy of Argon Ions on the Surface Roughness of the Main Sections of Single-Crystal Silicon;Technical Physics;2024-01

5. Enhancing Surface Smoothness of Precision-Polished Magnetic Heads Through Parameter Optimization in Ion Beam Etching Process;2023

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