1. ITRS (International Technology Roadmap for Semiconductors) Executive Summary 2001 edition, Downloaded from http://public.itrs.net/Files/2001ITRS/Home.htm.
2. T. Saito, Configuration and prediction of present and future ultraprecision positioning system, in: J. Otsuka (Ed.), Present and Future Technology of Ultraprecision Positioning, Fuji Technosystems, 2000, pp. 102–108.
3. Ultrasonic driven motor;Barth;IBM Tech. Disclosure Bull.,1973
4. Bulletin of Kiev polytechnical institute series;Larvinenco;Radio Electron,1976
5. Fundamental properties of friction and wear on friction drive by traveling wave type ultrasonic motor;Honda;J. Jpn. Soc. Tribol.,1993