X-ray lithography at the Stanford Synchrotron Radiation Laboratory-Reference-Cited by-同舟云学术

X-ray lithography at the Stanford Synchrotron Radiation Laboratory

Published:1986-05 Issue:1-3 Volume:246 Page:641-643
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Pianetta P.,Redaelli R.,Jaeger R.,Barbee T.W.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference6 articles.

1. Handbook of Synchrotron Radiation;Grobman,1983

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

2. A high-vacuum triple-axis-diffractometer for soft X-ray scattering experiments;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1988-04

3. Applications of multilayers to synchrotron radiation;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1988-04

4. Performance of layered synthetic microstructures in monochromator applications in the soft X-ray region;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1986-05