Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
3 articles.
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1. The use of x-ray capillary optics for lithography and microscopy;Optical and Quantum Electronics;1996-03
2. Imaging dissolution rate monitor: Mapping the photoresist response;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1993-11
3. Application of electron linacs in medicine, food sterilization and synchrotron light sources;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-04