Recent advances in X-ray nanolithography using synchrotron radiation at Super-ACO-Reference-Cited by-同舟云学术

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Recent advances in X-ray nanolithography using synchrotron radiation at Super-ACO

Published:1995-05 Issue:1-2 Volume:359 Page:388-393
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Rousseaux F,Chen Y,Haghiri-Gosnet A.M,Launois H

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference15 articles.

1. Absence of resolution degradation in X-ray lithography for λ from 4.5nm to 0.83nm

2. Electromagnetic calculation of soft x-ray diffraction from 0.1-μm scale gold structures

3. Recent Advances in X-Ray Lithography

4. Replication of very small periodic gratings with proximity x-ray lithography

5. A 100-nm patterned x-ray mask technology based on amorphous SiC membranes

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Cobalt Nanosized Particles Organized in a 2D Superlattice: Synthesis, Characterization, and Magnetic Properties;The Journal of Physical Chemistry B;1999-02-24

2. High coercivity in ultrathin epitaxial micrometer-sized particles with in-plane magnetization: Experiment and numerical simulation;Physical Review B;1998-01-15

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