Focusing of synchrotron radiation-Reference-Cited by-同舟云学术

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Focusing of synchrotron radiation

Published:1987-09 Issue:3 Volume:259 Page:566-575
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Ogata Atsushi

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference9 articles.

1. Phase space analysis applied to x-ray optics

2. an Introduction to Probability Theory;Moran,1968

3. Introduction to Matrix Methods in Optics;Gerrard,1975

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Control of X-Ray Beam Fluctuation in Synchrotron Radiation Lithography Beamline;Japanese Journal of Applied Physics;1995-10-15

2. Effect of Electron Beam Orbit Distortion on Optical Performance of the Synchrotron Radiation Lithography Beamline;Japanese Journal of Applied Physics;1994-12-30

3. Application of electron beam wobbling to SR X-ray lithography;Microelectronic Engineering;1989-05

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