Ion-implanted silicon detectors processed on a 100 mm wafer-Reference-Cited by-同舟云学术

Ion-implanted silicon detectors processed on a 100 mm wafer

Published:1991-02 Issue:1 Volume:301 Page:116-120
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Hietanen Iiro,Lindgren Jukka,Orava Risto,Tuuva Tuure,Brenner Richard,Andersson Mikael,Leinonen Kari,Ronkainen Hannu

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference3 articles.

1. DELPHI Microvertex Detector,1986

2. Development of high density readout for silicon strip detectors

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