Polysilanes for semiconductor fabrication
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics,Surfaces and Interfaces,Ceramics and Composites
Cited by 63 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
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5. Organosilicon and Related Group 14 Polymers;Reference Module in Chemistry, Molecular Sciences and Chemical Engineering;2021
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