Author:
Zheng Z.,Tressler R.E.,Spear K.E.
Subject
General Materials Science,General Chemical Engineering,General Chemistry
Reference24 articles.
1. Role of chlorine in silicon oxidation;Monkowski;Solid State Technol.,1979
2. Role of chlorine in silicon oxidation;Monkowski;Solid State Technol.,1979
3. Microstructure development during thermal oxidation of silicon in chlorine containing ambients;Monkowski;J. Noncrystall. Solids,1982
4. Phase separation and sodium passivation in silicon oxides grown in HCl/O2 ambients;Monkowski;J. electrochem. Soc.,1979
5. The effect of HCl and Cl2 on the thermal oxidation of silicon;Kriegler;J. electrochem. Soc.,1972
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