A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response-Reference-Cited by-同舟云学术

A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response

Published:2004-02 Issue:2 Volume:332 Page:141-146
ISSN:1631-0721
Container-title:Comptes Rendus Mécanique
language:en
Short-container-title:Comptes Rendus Mécanique

Author:

Ettouhami Aziz,Zahid Noureddine,Elbelkacemi Mourad

Publisher

Elsevier BV

Subject

Mechanics of Materials,General Materials Science

Reference18 articles.

1. A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity;Lee;IEEE Trans. Electron Devices,1982

2. A high-sensitivity integrated-circuit capacitive pressure transducer;Ko;IEEE Trans. Electron Devices,1982

3. Theory of Plates and Shells;Timoshenko,1959

4. A. Essaid, A. Ettouhami, M. Kerouad, M. Limouri, Contribution to study of capacitive pressure sensors, in: Eurosensors, Cambridge, 22–24 September 1987, England

5. A. Ettouhami, Modélisation, Intégrabilité et limites de fonctionnement d'un capteur de pression capacitif, Thesis 1987, Faculty of Sciences, Rabat, Maroc

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