Author:
Tsuru T.,Tsutou T.,Hatano T.,Yamamoto M.
Subject
Physical and Theoretical Chemistry,Spectroscopy,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Radiation,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Soft X-rays And Extreme Ultraviolet Radiation;Atwood,1999
2. Soft x-ray reduction lithography using multilayer mirrors
3. Proceedings of the Eighth International Conference on Synchrotron Radiation Instrumentation;Hatano,2004
4. Proceedings of the Eighth International Conference on Synchrotron Radiation Instrumentation;Tsuru,2004
Cited by
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