Surface profilometry by wavelength scanning Fizeau interferometer
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference7 articles.
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3. Rough surface profile measurement using speckle optical frequency domain reflectometry with an external cavity tunable diode laser;Barnes;Optik,1996
4. Wavelength-shift speckle interferometry for absolute profilometry using a mode-hop free external cavity diode laser;Tiziani;J Mod Opt,1997
5. Wavelength scanning profilometry for real-time surface shape measurement;Kuwamura;Appl Opt,1997
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