Hydrodynamics and solid mechanics structural analysis of mold deformation in nanoimprint lithography-Reference-Cited by-同舟云学术

Hydrodynamics and solid mechanics structural analysis of mold deformation in nanoimprint lithography

Published:2023-08 Issue: Volume:62 Page:102034
ISSN:2352-4316
Container-title:Extreme Mechanics Letters
language:en
Short-container-title:Extreme Mechanics Letters

Author:

Cai Jingxuan^ORCID,Li Guohua,Zhou Jianhua,Li Wen-Di

Funder

National Natural Science Foundation of China

Sun Yat-sen University

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Engineering (miscellaneous),Chemical Engineering (miscellaneous),Bioengineering

Reference36 articles.

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4. Combined helium ion beam and nanoimprint lithography attains 4 nm half-pitch dense patterns;Li;J. Vac. Sci. Technol. B, Nanotechnol. Microelectron.: Mater., Process., Meas. Phenom.,2012

5. Double transfer UV-curing nanoimprint lithography;Shen;Nanotechnology,2013

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