Physical and structural properties of ZnO sputtered films
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference23 articles.
1. High Q, Temperature Stable ZnO-On-SILICON SAW RESONATORS
2. ZnO Thin-Film SAW Devices
3. Surface acoustic wave filters in ZnO-SiO/sub 2/-Si layered structures
4. 1.5 GHz Low-Loss Surface Acoustic Wave Filter Using ZnO/Sapphire Substrate
5. Influence of step-like portions on the surface of ZnO/glass SAW filters on their frequency characteristics
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