Author:
Busta H.H.,Espinosa R.J.,Rakhimov A.T.,Suetin N.V.,Timofeyev M.A.,Bressler P.,Schramme M.,Fields J.R.,Kordesch M.E.,Silzars A.
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference10 articles.
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4. Matsukawa T, Kanemura S, Tokunaga K, Itoh J. Technical Digest, 12th Int Vacuum Microelectronics Conference, Darmstadt, 1999. p. 132
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