Selective growth of carbon nanotube at low temperate using triode type plasma enhanced CVD method
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing
2. Carbon Nanotubes for VLSI: Interconnect and Transistor Applications
3. High-Field Electrical Transport in Single-Wall Carbon Nanotubes
4. Quantum Interference and Ballistic Transmission in Nanotube Electron Waveguides
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Chemical vapor deposition and its application in surface modification of nanoparticles;Chemical Papers;2019-10-18
2. A novel hybrid method combining ASP with PECVD for in - situ low temperature synthesis of vertically aligned carbon nanotube films;Diamond and Related Materials;2017-08
3. Production of hydrogen-rich gas and multi-walled carbon nanotubes from ethanol decomposition over molybdenum modified Ni/MgO catalysts;Journal of Energy Chemistry;2014-03
4. Low-Temperature Growth of Carbon Nanotubes on Bi- and Tri-metallic Catalyst Templates;Topics in Catalysis;2013-05-14
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