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Mirror-grinding of single-crystal diamond substrates with a rotary grinder

  • Published:2022-01 Issue: Volume:121 Page:108733
  • ISSN:0925-9635
  • Container-title:Diamond and Related Materials
  • language:en
  • Short-container-title:Diamond and Related Materials

Author:

Aida Hideo,Oshima Ryuji,Minamigata Hiroki,Kawaguchi Shogo,Tokutake Junpei,Sifuentes Juan Manuel Del Angel,Kimura Yutaka

Funder

Japan Society for the Promotion of Science

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. CVD Diamond for Electronics and Sensors,2009

2. Silica based polishing of {100} and {111} single crystal diamond;Thomas;Sci. Technol. Adv. Mater.,2014

3. Surface smoothing of single-crystal diamond (100) substrate by polishing technique;Kubota;Diam. Relat. Mater.,2012

4. Two-step polishing technique for single crystal diamond (100) substrate utilizing a chemical reaction with iron plate;Kubota;Diam. Relat. Mater.,2015

5. Diamond Technology: Production Methods for Diamond and Gem Stones;Grodzinski,1953
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