Photoinduced deformation of a-C thin films prepared by RF magnetron sputtering-Reference-Cited by-同舟云学术

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Photoinduced deformation of a-C thin films prepared by RF magnetron sputtering

Published:2020-10 Issue: Volume:108 Page:107844
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Aono Masami,Miyazaki Hisashi,Kitazawa Nobuaki,Sato Yohei,Terauchi Masami

Funder

JSPS

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference29 articles.

1. Diamond-like carbon: state of the art;Grill;Diam. Relat. Mater.,1999

2. Density and microstructure of a-C thin films;Kumar;Diam. Relat. Mater.,2018

3. Tribological properties of amorphous carbon in hydrochloric acid with ta-C counterpart;Wu;Surf. Coat. Technol.,2019

4. Influence of deposition temperature on the structure, optical and electrical properties of a-C films by DCMS;Li;Appl. Surf. Sci.,2020

5. Effect of heat treatment on microstructures of magnetron sputtered amorphous carbon films;Yang;Diam. Relat. Mater.,2019

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Temporary change in NEXAFS spectra of amorphous carbon nitride films with photoinduced deformation by visible light irradiation;Journal of Applied Physics;2024-07-22

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