Production and deposition of CN radicals to produce amorphous carbon nitride films with high [N]/([N]+[C]) ratio
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. Collisional Transition Probabilities for Rotational Levels of CN (B2Σ+)
2. Rotational perturbations in the CN (B 2Σ+-X 2Σ+) tail band system. I. Analysis of the υ = 27 and 30 levels of CN (A 2Πi)
3. Violet emission of cyanogen produced in the reaction of argon(3P0,2) with cyanogen bromide. 1. Nascent vibrational and rotational distributions of CN(B2.SIGMA.+)
4. Mechanism of Nitrogen Incorporation into Amorphous-CNxFilms Formed by Plasma-Enhanced Chemical-Vapor Deposition of the Doublet and Quartet States of the CN Radical
5. Synthesis of Amorphous Carbon Nitride Films Using Dissociative Excitation Reaction
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1. Precursors of a-CNx(:H) films from the decompositions of BrCN and CH3CN with the discharged products of Ar;Diamond and Related Materials;2012-04
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