Tailoring sheet resistance through laser fluence and study of the critical impact of a V-shaped plasma plume on the properties of PLD-deposited DLC films for micro-pattern gaseous detector applications

Author:

Cesaria Maura,Serra Antonio,Manno Daniela,Aziz Muhammad Rizwan,Rella Simona,Malitesta Cosimino,Martino Maurizio,Verwilligen Piet,Caricato Anna Paola

Funder

National Institute of Nuclear Physics

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference48 articles.

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5. Vapor deposition processes for amorphous carbon films with sp3 fractions approaching diamond;Cuomo,1991

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