Design and construction of UVSOR-BL4A2 beam line for nano-structure processing-Reference-Cited by-同舟云学术

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Design and construction of UVSOR-BL4A2 beam line for nano-structure processing

Published:2001-07 Issue: Volume:467-468 Page:1279-1281
ISSN:0168-9002
Container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Author:

Takezoe N.,Yanagida H.,Tanaka T.,Kurosawa K.,Nonogaki Y.,Noda H.,Mekaru H.,Urisu T.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference8 articles.

1. Ablation of Polymers and Biological Tissue by Ultraviolet Lasers

2. Deposition of high quality SiO2 layers from TEOS by excimer laser

3. ArF laser induced CVD of SiO2 films: a search for the best suitable precursors

4. Pulsed ultraviolet laser deposition of SiO2 films at 248 nm

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