Optimization-Based Design of Compensational Control Systems for Multistage Discrete Manufacturing Processes-Reference-Cited by-同舟云学术

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Optimization-Based Design of Compensational Control Systems for Multistage Discrete Manufacturing Processes

Published:1987-07 Issue:5 Volume:20 Page:147-152
ISSN:1474-6670
Container-title:IFAC Proceedings Volumes
language:en
Short-container-title:IFAC Proceedings Volumes

Author:

Kiitam A.,Saks E.

Publisher

Elsevier BV

Subject

General Medicine

Reference9 articles.

1. The application of control theory to the automation of IC manufacturing: progress and problems;Atherton,1984

2. Rends in wafer fab and their driving economic forces;Bottoms;Solid State Technology,1983

3. Process control for semiconductor manufacturing;Campbell;Semiconductor International,1984

4. Approximate optimization of compensational control algorithms for multistagetecnnological processes;Kiitam;Autom. & Remote Control,1961

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