1. Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process;Fedder;Proceedings of the Ninth IEEE Workshop on Micro Electro Mechanical Systems, San Diego, CA, February,1996
2. “Integrated Microelectromechanical Systems: A Perspective on MEMS in the 90s”, in Proceedings of the Fourth IEEE Workshop on Micro Electro Mechanical Systems (MEMS-91);Wise,1991
3. “Silicon as a Mechanical Material”, Proceedings IEEE;Petersen,1982
4. Semiconductor Sensors;Sze,1994
5. Semiconductor Integrated Circuit Process Technology;Runyan,1990