Native oxidation of sputter deposited polycrystalline copper thin films during short and long exposure times: Comparative investigation by specular and non-specular grazing incidence X-ray absorption spectroscopy-Reference-Cited by-同舟云学术

Native oxidation of sputter deposited polycrystalline copper thin films during short and long exposure times: Comparative investigation by specular and non-specular grazing incidence X-ray absorption spectroscopy

Published:2010-04 Issue:4 Volume:52 Page:1305-1316
ISSN:0010-938X
Container-title:Corrosion Science
language:en
Short-container-title:Corrosion Science

Author:

Keil P.,Frahm R.,Lützenkirchen-Hecht D.

Publisher

Elsevier BV

Subject

General Materials Science,General Chemical Engineering,General Chemistry

Reference85 articles.

1. Initial study on copper CMP slurry chemistries

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4. Corrosion inhibition by self-assembled monolayers for enhanced wire bonding on Cu surfaces

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