Author:
Mukherjee S.K.,Barhai P.K.,Srikanth S.
Subject
General Materials Science,General Chemical Engineering,General Chemistry
Reference50 articles.
1. A proposed standard thermal test object for medical ultrasound;Shaw;Ultrasound Med. Biol.,1999
2. Thin film thermocouple arrays for sliding surface temperature measurement;Kennedy;Wear,1997
3. Design, fabrication and characterization of metal embedded thin film thermocouples with various film thicknesses and junction sizes;Zhang;J. Micromech. Microeng.,2006
4. Platinum/palladium thin-film thermocouples for temperature measurement on silicon wafers;Kreider;Sens. Actuators A,1998
5. K.G. Kreider, Temperature calibration wafer for rapid thermal processing using thin film thermocouples, U.S. Patent No. 6,037,645, March 14, 2000.
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献