Modeling of clusters deposition under the effect of thermophoresis during thermal plasma flash evaporation process
Author:
Affiliation:
1. Department of Materials Engineering, School of Engineering, The University Of Tokyo, 7-3-1, Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan
Publisher
Informa UK Limited
Subject
General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1016/S1468-6996%2801%2900008-0
Reference28 articles.
1. Particle transport in a parallel-plate semiconductor reactor: Chamber modification and design criterion for enhanced process cleanliness
2. Combined effects of thermophoresis and electrophoresis on particle deposition onto a wafer
3. Massively parallel simulations of Brownian dynamics particle transport in low pressure parallel‐plate reactors
4. Thermophoresis: The mass transfer mechanism in modified chemical vapor deposition
5. Unsteady heat and mass transfer on the codeposition of SiO2/GeO2 during the modified chemical vapor deposition process
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Microstructural Effects and Properties of Non-line-of-Sight Coating Processing via Plasma Spray-Physical Vapor Deposition;Journal of Thermal Spray Technology;2017-05-23
2. Combined effect of thermophoretic and Coulombic forces on particle deposition in a turbulent flow;International Journal of Thermal Sciences;2016-11
3. Evaporation Kinetics and Thermophoresis of Particles;Encyclopedia of Surface and Colloid Science, Third Edition;2015-12-04
4. Modeling particle deposition from fully developed turbulent flow;Applied Mathematical Modelling;2011-07
5. Turbulent thermophoresis effect on particle transport processes;International Journal of Thermal Sciences;2006-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3