Improvement of pyrometric sensing in rapid thermal processing via adaptive cancellation of lamplight interference-Reference-Cited by-同舟云学术

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Improvement of pyrometric sensing in rapid thermal processing via adaptive cancellation of lamplight interference

Published:1995-05 Issue:5 Volume:3 Page:643-649
ISSN:0967-0661
Container-title:Control Engineering Practice
language:en
Short-container-title:Control Engineering Practice

Author:

Cho Young Man,Kailath T.

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Science Applications,Control and Systems Engineering

Reference5 articles.

1. Optimization of transient temperature uniformity in RTP systems;Norman;IEEE Trans. Electron Dev.,1992

2. Digital Signal Processing;Oppenheim,1975

3. In-situ temperature control for rtp via thermal expansion measurements;Peuse,1993

4. Systems Oriented Survey of Noncontact Temperature Measurement Techniques for Rapid Thermal Processing;Peyton;Rapid Thermal and Related Processing Techniques,1990

5. Dynamics and control of a rapid thermal multiprocessor;Schaper,1991

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