Use of gratings and periodic structures as alignment targets on wafer steppers-Reference-Cited by-同舟云学术

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Use of gratings and periodic structures as alignment targets on wafer steppers

Published:1989-04 Issue:2 Volume:11 Page:63-69
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Stevenson J.T.M.,Jordan J.R.

Publisher

Elsevier BV

Subject

General Engineering

Reference32 articles.

1. Optical Production of Large Area Patterns for Microelectronics;Milne,1978

2. An Advanced Step and Repeat Aligner for VLSI;Dey,1980

3. Grating Interferometry for Positioning the X-Y Stages of a Wafer Stepper;Berger,1984

4. A High Resolution Laser Scale Interferometer;Iwaoka,1984

5. Holograf, 2366 Walsh Avenue, Santa Clara, California 95051, USA

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An integrated analog sensor for automatic alignment;IEEE Journal of Solid-State Circuits;1995

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