Experimental investigation of shape changes in electrochemical micromachining through photoresist masks-Reference-Cited by-同舟云学术

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Experimental investigation of shape changes in electrochemical micromachining through photoresist masks

Published:1989-04 Issue:2 Volume:11 Page:79-82
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Rosset E.,Landolt D.

Publisher

Elsevier BV

Subject

General Engineering

Reference7 articles.

1. The Principles and Practice of Photochemical Machining and Photoeching;Allen,1986

2. Fabrication of fine apertures in metal foils by Photoelectrochemical milling;Chatterjee;Precision Engineering,1986

3. Wicke, W.C. US Patent 2, 900 (June 27 1961), 283

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2. Influence of Various Pulse Waveforms during Fabrication of Micro Rectangular Pattern by Masked Tool using Electrochemical Micromachining;Journal of Advanced Manufacturing Systems;2021-01-06

3. Review—Through-Mask Electrochemical Micromachining;Journal of The Electrochemical Society;2018

4. Through-Mask Electrochemical Micromachining of Aluminum in Phosphoric Acid;Journal of The Electrochemical Society;2017

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