Author:
Taylor James B.,Tu Jay F.
Reference13 articles.
1. New horizons in micropositioning;Iscoff;Semiconductor Int,1991
2. Nanometrology;Yoshida;Metrologia,1991
3. Nanometer level positioning using three kinds of lead screws;Otsuka;Nanotechnology,1992
4. High precision positioning for submicron lithography;Ishihara;Bull Japan Soc Prec Eng,1991
5. Piezodriven 50 μm range stage with subnanometer resolution;Scire;Rev Sci Instrum,1978
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