Photoforming intricate articles in thickened high definition photoresist
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference16 articles.
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Processing and characterisation of precision microparts from nickel-based materials;Microsystem Technologies;2008-11-11
2. Processing and characterization of precision microparts from nickel-based materials;2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS;2008-04
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