Author:
Mejia S.R.,McLeod R.D.,Kao K.C.,Card H.C.
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. Compositional characterization of microwave plasma a-Si: H films
2. Thin Film Semiconductors for Photovoltaic Devices by Microwave Plasma Techniques;Card;Final Report for Contract Serial No. OSx81-00076 of the National Research Council of Canada,1983
3. Microwave sputtering system for the fabrication of thin solid films
4. Plasma Chemistry in Electrical Discharges;McTaggart,1967
5. Structural interpretation of the vibrational spectra ofa-Si: H alloys
Cited by
11 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献