Author:
Janai M.,Weil R.,Pratt B.
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Preparation and properties of fluorinated amorphous silicon, in Amorphous Semiconductor Technologies & Devices;Matsumura,1982
2. Determination of the fluorine concentration in silicon films grown from the disproportionation of SiF2
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