Optical and luminescence properties of polymer-like a-C:H films deposited in a dual-mode PECVD reactor-Reference-Cited by-同舟云学术

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Optical and luminescence properties of polymer-like a-C:H films deposited in a dual-mode PECVD reactor

Published:1996-05 Issue: Volume:198-200 Page:623-627
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Bourée J.E.,Godet C.,Drévillon B.,Etemadi R.,Heitz T.,Cernogora J.,Fave J.L.

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Amorphous carbon

2. Deposition mechanism of a-C and a-C:H

3. Correlation between ion-flux and microstructure of a-C:H films

4. Radiative recombination in a-Si1−xCx:H films

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Single and dual-mode plasma enhanced chemical vapor deposition of fluorinated diamond-like carbon films;Surface and Coatings Technology;2012-12

2. Dual-Frequency Plasma Enhanced Chemical Vapor Deposition of Diamond-Like Carbon Thin Films;Acta Physica Polonica A;2012-07

3. Investigation of the properties of diamond-like carbon thin films deposited by single and dual-mode plasma enhanced chemical vapor deposition;Thin Solid Films;2011-03

4. Violet/blue emission from hydrogenated amorphous carbon films deposited from energetic CH3+ ions and ion bombardment;Journal of Applied Physics;2002-02-15

5. Radiative and nonradiative recombination in polymerlikea−C:Hfilms;Physical Review B;1999-08-15

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