Nanocrystalline silicon formation in a SiH4 plasma cell-Reference-Cited by-同舟云学术

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Nanocrystalline silicon formation in a SiH4 plasma cell

Published:1996-05 Issue: Volume:198-200 Page:875-878
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Otobe Masanori,Kanai Tomonori,Ifuku Toru,Yajima Hiroshi,Oda Shunri

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Experimental investigation of particulate formation in He-SiH4modulated RF discharges

2. Laser-Induced-Fluorescence Detection of SiH2Radicals in a Radio-Frequency Silane Plasma

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